Chemrapid Surface-modified Ultrapure Chemicals Filter

Non-dewetting modified membrane improves surface energy
Cobetter Chemrapid Filter Series are composed of a surface-modified PTFE membrane that is bonded with PFA which results in ultra low metal extractables. It solves the problem of defect fluidity when if filters foam. Chemrapid Filter Series improve flow performance, cleanliness and contamination control at low wafer defect levels for highly corrosive acids and bases. The modified PTFE membrane enables semiconductor makers to meet their critical chemical filtration requirements.      


Superior filtration efficiency and high flow rate 

They are suitable for filtration of H2SO4, H3PO4, HNO3, HCl, NH4OH, H2O2, TMAH and deionized water at room temperature and SC1, SC2, SPM, metal etching and other applications at high temp ratures. Excellent chemical compatibility and ultra-low metal extractables ensure superior filtration efficiency and extended service life. The non-dewetting PTFE membrane increases the surface energy providing high flow rates and superior filtration efficiency. Ultra-pure cleanliness reduces equipment set up time. Its one-piece structural design makes it easy to install and replace. Available in T, L and In-line configurations which simplify system design.




Application

  • Single Wafer and Batch Processing in advanced technology node

  • Wet etch and clean

  • Chemicals



Feature

  • Excellent chemical compatibility

  • All fluorine construction makes it suitable for the filtration of highly corrosive high temperature chemicals.

  • Suitable for critical condition

  • 100% integrity tested

  • High flow rates, low pressure drop, long service life

  • Low extractables

  • Provided prewet option, reducing equipment pre-operation time.



  • Specification
  • Performance
  • Ordering Information


Product Specification

Membrane    Surface-modified PTFE

Supports/Cage
/Core/End Caps
 

PFA
O-ringTEV or FFKM

Shell

( Disposable only)

PFA

Max. Operating
Temperature

180°C

Max. Differential
Pressure

Cartridge 0.58MPa @25°C            Disposable 0.49MPa @ 25°C
Filter Areasø 68mm     
X1X2
0.91 m²/10"

1.21 m²/10"

ø 83mm
Z1Z2Z3Z4Z5
1.30 m²/10"2.20 m²/10"3.0 m²/10"

2.20 m²/10"  
(Especially for SPM,  HPM 

120-160°C

3.0 m²/10"

 (High temperature)


                                                                                                                                                                                                                 




Ordering Information


Cartridge

CHR1234567
CHP*(15nm)


Block 1Block 2Block 3Block 4Block 5

Diameter

Removal Ratings  

End Cap

Nominal Length   

O-ring Material

Z1=ø83mm

Z2=ø83mm

Z3=ø83mm

Z4=ø83mm

Z5=ø83mm

X1=ø68mm

X2=ø68mm


NM07=7nm

NM10=10nm

NM15=15nm

NM20=20nm

NM30=30nm

NM50=50nm

0010=0.1μm

0020=0.2μm

0045=0.45μm

0050=0.5μm

TC=Standard

       ø83mm/ø68mm

CLTC=For Cobetter PFA housing

       ø83mm/ø68mm

ETC=For E PFA housing

         ø83mm

TPCJ=For P PFA housing

          ø68mm

10=10" 

20=20" 

P=TEV

K=FFKM

Block 6

Block 7
Cleanliness
Package 

XS=<1 μg/device

S=<3 μg/device

L=<10 μg/device 

M=<25μg/device

H=<40μg/device 

E=Electronic grade 

7/10nm

7/10nm

10/15/20/30nm

ø68mm only

50nm 0.1/0.2/0.45/0.5μm

50nm 0.1/0.2/0.45/0.5μm

D=Dry

W=Prewet, UPW






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