High Precision All Fluorine Filter Cartridges

SEM-PFA Filter Cartridges are composed of high-purity PFA 440HP. The all-fluorine structure provides high temperature tolerance and corrosion resistance which are good features for electronic-grade chemical filtration.

  • Specification
  • Performance
  • Ordering Information

Precise Pore Sizes

Available in pore sizes for use in the  semiconductor industry.

All-Fluorine Structure

A high-purity PFA 440HP structure ensures low extractable.

Pre-Wetting Packaging

Available in pre-wetted package for easy use.

Excellent Chemical Compatibility

A PTFE membrane combined with PFA structure results in a filter with high temperature and corrosion resistance.

Excellent Chemical Compatibility

Specific Applications

Electronic Grade Chemical Filtration SC1 and SC2 Filtration

Operating Conditions

Filter MediaPTFE
End Cap /Core/CagePFA
Max. Operating Temperature180°C
Max. Differential Pressure0.55 MPa / 25°C
0.24 MPa / 80°C
Metal Ion Leach25 ug/device or 10 ug/device
Particle Flush0.2μm particles<10 grains/CC

Flow Rate Characteristics


Ordering Information


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