Ultra High Precision & Flow Rate
HAPES Filter Cartridge Series

HAPES Filter Cartridges are composed of specially-designed asymmetric HAPES membrane and high-purity PFA/HDPE material which make them ideally suited for state-of-the-art semiconductor fabrication processes. The HAPES media is suitable for the filtration of aqueous solutions including HF/BOE/Developer. The specially designed asymmetric structure of the membrane ensures ultra-fine pore size up to 2nm and high flow rates. High-purity PFA/HDPE and special rinse technology ensure ultra-low extractable and high cleanliness.



  • Specification
  • Performance
  • Ordering Information

Ultra-fine Pore Size

Asymmetric HAPES membrane pore sizes up to 2nm


Low Extractable and High Cleanliness

High-purity PFA/HDPE and special rinse technology ensure ultra-low extractable and high cleanliness


High Flow Rates and High Dirty Hold Capability


Each Element is Individually Integrity Tested

Filter MediaAsymmetric HAPES
End Cap /Core/CageHDPE
Max. Operating Temperature70°C

Flow Rate Characteristics

HAPES.jpg

HAPES.jpg

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