PSA Disposable Filter Cartridge
Ultra High Precision & Flow Rates Easy-to-Use & Efficient Change-Out

PSA Disposable Filter Cartridges are composed of specially-designed asymmetric HAPES membrane and high-purity PFA/HDPE material which makes them ideally suited for state-of-the-art semiconductor fabrication processes. The HAPES media is suitable for the filtration of aqueous solutions including HF/BOE/Developer. The specially-designed asymmetric structure of the membrane ensures ultra-tne pore size up to 2nm and high ow rates. High-purity PFA/HDPE and special rinse technology ensure ultra-low extractable and high cleanliness.


One-piece structural design results in this filter having a quick and efficient change-out making it easy-to-use. Each element is individually Integrity Tested.

  • Specification
  • Performance
  • Ordering Information

Ultra-fine Pore Size

Asymmetric HAPES membrane pore sizes up to 2nm


Low Extractable and High Cleanliness


High-purity PFA/HDPE and special rinse technology ensure ultra-low extractable and high cleanliness


High Flow Rates and High Dirty Hold Capability


Easy-to-use and Efficient Change-out


Each Element is Individually Integrity Tested


Materials of Construction

Filter MediumAsymmetric HAPES
CoreHDPE
Cage/End CapsPFA
Max. Different Pressure0.49MPa@25°C
0.34MPa@70°C

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